Liu <br/><br/>
Foundations of MEMS 
Chang Liu 
 - New Jersey, USA  Pearson Education Inc.  2006 
 - xxii, 530p.  ill.  24 cm 
<br/><br/> includes Bibliographical References and Index 
<br/><br/><label>ISBN: </label>0131472860 
<br/><br/><label>LCCN: </label>2005048923 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems