| 000 | 00575nam a2200193Ia 4500 | ||
|---|---|---|---|
| 001 | 0000002907 | ||
| 005 | 20241001121139.0 | ||
| 008 | 240926s9999 xx 000 0 und d | ||
| 010 |
_a _a _a2005048923 |
||
| 020 | 0 | 0 | _a0131472860 |
| 090 | 0 | 0 | _aTK 7875.L48 2006 |
| 100 | 1 | 0 |
_aLiu _hChang |
| 245 | 1 | 0 |
_aFoundations of MEMS _cChang Liu |
| 260 | 0 | 0 |
_aNew Jersey, USA _bPearson Education Inc. _c2006 |
| 300 |
_axxii, 530p. _bill. _c24 cm |
||
| 500 | 0 | 0 | _aincludes Bibliographical References and Index |
| 650 | 0 | 0 | _aMicroelectromechanical systems |
| 901 | _ahttp://www.prenhall.com | ||
| 999 |
_c2880 _d2880 |
||