Foundations of MEMS
Liu
Foundations of MEMS Chang Liu - New Jersey, USA Pearson Education Inc. 2006 - xxii, 530p. ill. 24 cm
includes Bibliographical References and Index
0131472860
2005048923
Microelectromechanical systems
Foundations of MEMS Chang Liu - New Jersey, USA Pearson Education Inc. 2006 - xxii, 530p. ill. 24 cm
includes Bibliographical References and Index
0131472860
2005048923
Microelectromechanical systems